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ChemicalBook--->CAS DataBase List--->4419-47-0

4419-47-0

4419-47-0 Structure

4419-47-0 Structure
IdentificationMore
[Name]

TETRAKIS(DIETHYLAMINO)TITANIUM
[CAS]

4419-47-0
[Synonyms]

TDEAT
TETRAKIS (DIETHYLAMIDO) TITANIUM
TETRAKIS(DIETHYLAMINO)TITANIUM
TETRAKIS DIETHYL AMINO TITANIUM (IV)
TITANIUM (IV) DIETHYLAMIDE
TITANIUM TETRAKIS(DIETHYLAMIDE)
Titanium, tetrakis(diethylamino)-
TETRAKIS(DIETHYLAMINO)TITANIUM, 99.999%
TETRAKIS(DIETHYLAMINO)TITANIUM, TECH.
Tetrakis(diethylamino)titanium,99.99%(metalsbasis)
Tetrakis(diethylamino)titanium,99%
Ethanamine, N-ethyl-, titanium(4+) salt
tetrakis(diethylamido)titanium(iv)
titanium diethylamide
Tetrakis(diethylamino)titanium(IV), Titanium(IV) tetrakis(diethylamide)
[Molecular Formula]

C16H40N4Ti
[MDL Number]

MFCD00015648
[Molecular Weight]

336.38
[MOL File]

4419-47-0.mol
Chemical PropertiesBack Directory
[Appearance]

Clear dark red liquid
[Melting point ]

4 °C
[Boiling point ]

112 °C0.1 mm Hg(lit.)
[density ]

0.931 g/mL at 25 °C(lit.)
[refractive index ]

n20/D 1.536(lit.)
[Fp ]

-18 °F
[storage temp. ]

Flammables area
[solubility ]

Reacts with air.
[form ]

liquid
[color ]

yellow to orange
[Specific Gravity]

0.95
[Hydrolytic Sensitivity]

8: reacts rapidly with moisture, water, protic solvents
[Sensitive ]

Moisture Sensitive
[BRN ]

3621431
[CAS DataBase Reference]

4419-47-0(CAS DataBase Reference)
[NIST Chemistry Reference]

Tetrakis(diethylamino)titanium(4419-47-0)
[EPA Substance Registry System]

4419-47-0(EPA Substance)
Safety DataBack Directory
[Hazard Codes ]

F,C,Xi
[Risk Statements ]

R11:Highly Flammable.
R14/15:Reacts violently with water, liberating extremely flammable gases .
R34:Causes burns.
R36/37/38:Irritating to eyes, respiratory system and skin .
[Safety Statements ]

S26:In case of contact with eyes, rinse immediately with plenty of water and seek medical advice .
S36/37/39:Wear suitable protective clothing, gloves and eye/face protection .
S43:In case of fire, use ... (indicate in the space the precise type of fire-fighting equipment. If water increases the risk add-Never use water) .
S45:In case of accident or if you feel unwell, seek medical advice immediately (show label where possible) .
S37/39:Wear suitable gloves and eye/face protection .
S16:Keep away from sources of ignition-No smoking .
[RIDADR ]

UN 3398 4.3/PG 1
[WGK Germany ]

3
[F ]

10-21
[TSCA ]

Yes
[HazardClass ]

4.3
[PackingGroup ]

II
[HS Code ]

29310099
Questions And AnswerBack Directory
[Description]

Tetrakis (diethylamino) titanium is useful Ti-source precusor. Tetrakis (diethylamino) titanium is useful in TiN film deposition using the atomic layer deposition method1,2. It is also a useful compound during the process of etching a layer of diamond like carbon.
[Reference]

  1. Kim, Ju Youn, et al. "Comparison of TiN Films Deposited Using Tetrakisdimethylaminotitanium and Tetrakisdiethylaminotitanium by the Atomic Layer Deposition Method." Japanese Journal of Applied Physics 42.7A (2003):4245-4248.
  2. Katamreddy, Rajesh, et al. "Ti source precursors for atomic layer deposition of TiO2, STO and BST." Ecs Transactions 16.4(2008):660-71.
  3. Shoemaker, Erika Leigh, et al. "Process for reactive ion etching a layer of diamond like carbon." US, US8409458. 2013.
Hazard InformationBack Directory
[Chemical Properties]

Clear dark red liquid
[Uses]

[General Description]

Atomic number of base material: 22 Titanium
[reaction suitability]

core: titanium
reagent type: catalyst
[Purification Methods]

Dissolve it in *C6H6, filter if a solid separates, evaporate under reduced pressure and distil it. It is an orange liquid which reacts violently with alcohols. [Bradley et al. J Chem Soc 3857 1960, Beilstein 4 IV 313.]
Spectrum DetailBack Directory
[Spectrum Detail]

TETRAKIS(DIETHYLAMINO)TITANIUM(4419-47-0)FT-IR
Well-known Reagent Company Product InformationBack Directory
[Acros Organics]

Tetrakis(diethylamino)titanium, 99%(4419-47-0)
[Alfa Aesar]

Tetrakis(diethylamino)titanium, 99.99% (metals basis)(4419-47-0)
[Sigma Aldrich]

4419-47-0(sigmaaldrich)
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