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ChemicalBook--->CAS DataBase List--->19782-68-4

19782-68-4

19782-68-4 Structure

19782-68-4 Structure
IdentificationBack Directory
[Name]

TETRAKIS(DIMETHYLAMIDO)HAFNIUM(IV),
[CAS]

19782-68-4
[Synonyms]

TDMAH
TDMAH: Hf(N(CH3)2)4
Hafnium(4+) dimethylamide
Hafnium tetradimethylamide
Dimethylamine hafnium(4+) salt
Tetrakis(dimethylamino)hafnium(IV) 99.999%
TETRAKIS(DIMETHYLAMIDO)HAFNIUM(IV), 99.99+%
Tetrakis(dimethylamino)hafnium, 98+% (99.99+%-Hf, <0.2% Zr) TDMAH
Tetrakis(dimethylamido)hafnium(IV) packaged for use in deposition systems
Tetrakis(dimethylamido)hafnium(IV),TDMAH, Tetrakis(dimethylamino)hafnium(IV)
Tetrakis(dimethylamino)hafnium, 98+% (99.99+%-Hf, <0.2%-Zr) TDMAH, PURATREM, 72-8000, contained in 50ml Swagelok(R) cylinder (96-1071) for CVD/ALD
Tetrakis(dimethylamino)hafnium, 98+% (99.99+%-Hf, <0.2%-Zr) TDMAH, PURATREM, 72-8000, contained in 50 ml Swagelok(R) cylinder (96-1070) for CVD/ALD
[Molecular Formula]

C8H24HfN4
[MDL Number]

MFCD01862473
[MOL File]

19782-68-4.mol
[Molecular Weight]

354.796
Chemical PropertiesBack Directory
[Melting point ]

26-29 °C(lit.)
[Boiling point ]

85°C/0.1mm
[density ]

1.098 g/mL at 25 °C
[Fp ]

109 °F
[form ]

crystal
[color ]

colorless to pale yellow
[Specific Gravity]

1.40
[Hydrolytic Sensitivity]

8: reacts rapidly with moisture, water, protic solvents
[Sensitive ]

moisture sensitive, store cold
[InChIKey]

ZYLGGWPMIDHSEZ-UHFFFAOYSA-N
[CAS DataBase Reference]

19782-68-4
Safety DataBack Directory
[Hazard Codes ]

F,C
[Risk Statements ]

11-14-34
[Safety Statements ]

6-26-36/37/39-43-45
[RIDADR ]

UN 3396 4.3/PG 2
[WGK Germany ]

3
Hazard InformationBack Directory
[Uses]

Used as precursor for atomic layer deposition of Hafnium Oxide nanolaminates, which are used as a reploacement for Silicon oxide in semiconductor devices.
[General Description]

Please inquire for bulk quantity, pricing, and packaging options.
[reaction suitability]

core: hafnium
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