Identification | Back Directory | [Name]
TRIFLUOROMETHANESULFONIC ACID TRIFLUOROMETHYL ESTER | [CAS]
3582-05-6 | [Synonyms]
Trifluormethyl triflate TrifluoroMethyltriflate rifluoromethyltrifluoromethanesulfonate Trifluormethyl trifluoromethanesulfonate TRIFLUOROMETHYL TRIFLUOROMETHANESULFONATE Trifluoromethyl trifluoromethanesulphonate TRIFLUOROMETHANESULFONIC ACID TRIFLUOROMETHYL ESTER methanesulfonicacid,trifluoro-,trifluoromethylester Methanesulfonicacid, 1,1,1-trifluoro-, trifluoroMethyl ester | [Molecular Formula]
C2F6O3S | [MDL Number]
MFCD04973017 | [MOL File]
3582-05-6.mol | [Molecular Weight]
218.07 |
Hazard Information | Back Directory | [Chemical Properties]
Colorless to pale yellow liquid | [Uses]
Trifluoromethyl Triflate can be used for thermal atomic layer etching processes. | [Synthesis Reference(s)]
The Journal of Organic Chemistry, 52, p. 4147, 1987 DOI: 10.1021/jo00228a001 |
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