TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM
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TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM ??
- ???
- <-50 °C
- ?? ?
- 79 °C0.1 mm Hg(lit.)
- ??
- 1.324 g/mL at 25 °C(lit.)
- ???
- 52 °F
- ?? ??
- 2-8°C
- ??? ??
- ??
- Specific Gravity
- 1.324
- ??
- ??~??
- ??
- Air & Moisture Sensitive
- Hydrolytic Sensitivity
- 9: reacts extremely rapidly with atmospheric moisture - may be pyrophoric - glove box or sealed system required
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- ?? ? ?? ??
- ?? ? ???? ?? (GHS)
| ??? ?? | F,Xi | ||
|---|---|---|---|
| ?? ???? ?? | 11-14-36/37/38 | ||
| ????? | 16-26-36 | ||
| ????(UN No.) | UN 3398 4.3/PG 2 | ||
| WGK ?? | 3 | ||
| TSCA | No | ||
| ?? ?? | 4.3 | ||
| ???? | II | ||
| HS ?? | 2921199990 | ||
| ???? ?? | 2005-3-3341 |
| ????(GHS): |
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| ?? ?: | Danger | |||||||||||||||||||||
| ??·?? ??: |
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TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM C??? ??, ??, ??
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Precursors Packaged for Depositions Systems?? ??
Atomic number of base material: 72 HafniumTETRAKIS(ETHYLMETHYLAMINO)HAFNIUM ?? ?? ? ???
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TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM ?? ??
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| ??? | ?? | ??? | ?? | ?? ? | ?? |
|---|---|---|---|---|---|
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