| Identification | Back Directory | [Name]
TETRAKIS(ETHYLMETHYLAMINO)TITANIUM | [CAS]
308103-54-0 | [Synonyms]
TEMAT
TETRAKIS(ETHYLMETHYLAMINO)TITANIUM
TITANIUM TETRAKIS(ETHYLMETHYLAMIDE)
tetrakis(ethylmethylamido)titanium(iv)
tetrakis(ethylmethylamino)titanium(iv)
TETRAKIS(ETHYLMETHYLAMINO)TITANIUM, 99.9
TEMAT: Tetrakis(ethylmethylamino)titanium
TITANIUM TETRAKIS(ETHYLMETHYLAMIDE), 99+%
TETRAKIS(ETHYLMETHYLAMINO)TITANIUM,99%(99.99%-TI)PURATREM
Tetrakis(ethylMethylaMido)titaniuM(IV) electronic grade, >=99.99% | [Molecular Formula]
C12H32N4Ti | [MDL Number]
MFCD00799591 | [MOL File]
308103-54-0.mol | [Molecular Weight]
280.28 |
| Chemical Properties | Back Directory | [Boiling point ]
80 °C/0.1 mmHg (lit.) | [density ]
0.923 g/mL at 25 °C (lit.) | [Fp ]
36 °F | [storage temp. ]
2-8°C | [form ]
liquid | [color ]
yellow to orange | [Specific Gravity]
0.923 | [Hydrolytic Sensitivity]
8: reacts rapidly with moisture, water, protic solvents | [Sensitive ]
moisture sensitive |
| Hazard Information | Back Directory | [Uses]
Precursor to titanium nitride (TiN) thin films by organometallic chemical vapor deposition (OMCVD). | [General Description]
Atomic number of base material: 22 Titanium |
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